Plasma Chemistry Modeling

Kinema Research provides consulting and performs contract research in plasma chemistry modeling.

Our experience in plasma chemistry modeling began in the mid-1970s with research on the ArO*, XeO*, ArF*, KrF*, XeF*, XeCl*, and NaXe* excimer lasers; on the CO gas discharge molecular laser; and on Air Chemistry. [See References (1)-(3)]. In recent years we have for customers assembled plasma chemistry models and performed non-equilibrium kinetics calculations on chemistries of contemporary interest such as the etching chemistries Cl2, HBr, F2, C2F6, CHF3, c-C4F8, C4F6, and other applied chemistries such as He/Ar/O2 and N2/H2 [See Reference (4)].

Most of our modeling is performed using 0-D or global modeling codes such as KINEMA or 2-D codes such as PLASMATOR. We also write specialized modeling or simulation codes for some problems such as the PIC code that we wrote for our research on Dielectric Barrier Discharges [PDF].

We have also developed neural network software for correlating plasma chemistry data and displaying multi-dimensional response surfaces.

We have been using artificial neural network algorithms in applied physics since the late 1980s. References (5)-(8) represent some of our published work in this area.

 

Air Chemistry Data (PDF)
Chemistry Data (text)
Cross Section Data (text)

species


References

1. “Kinetic Processes in Ar/Kr/F2 Laser Mixtures”, W. L. Morgan and A. Szoke, Phys. Rev. A 23, 1256 (1981).

2. “Effects of O2 on Low Pressure CO Laser Discharges”, W. L. Morgan and E. R. Fisher, Phys. Rev. A 16, 1186 (1977).

3. “An Air Breakdown Kinetic Model”, A. E. Rodriguez, W. L. Morgan, et al., J. Appl. Phys. 70, 2015 (1991).

4. “Cross Section Set and Chemistry Model for the Simulation of c-C4F8 Plasma Discharges”, G. I. Font, W. L. Morgan, and G. Mennenga, J. Appl. Phys. 91, 3530 (2002).

5. “Analysis of Spectra from Laser Produced Plasmas Using a Neural Network”, A. L. Osterheld, W. L. Morgan, J. T. Larsen, B. K. F. Young, and W. H. Goldstein, Phys. Rev. Letts. 73, 1505 (1994).

6. “The Use of Artificial Neural Networks in Plasma Spectroscopy”, W. L. Morgan, J. T. Larsen, and W. J. Goldstein, J. Quant. Spectroscopy and Radiative Transfer 51, 247 (1994).

7. “The Feasibility of Using Neural Networks to Obtain Cross Sections from Electron Swarm Data”, W. L. Morgan, IEEE Trans. on Plasma Science19, 250 (1991).

8. “Artificial Neural Networks for Computing in Plasma Physics”, W. L. Morgan in Modeling and Engineering of Plasmas, ed. E. Marode (1992).